Study of Elemental and Structural Phase Composition of Multilayer Nanostructured TiN / MoN Coatings, their Physical and Mechanical Properties
The results of investigation multilayer TiN / MoN coatings. Arc-PVD method. Parameters of multilayer TiN/MoN deposition. The energy-dispersive spectrum of coating. Sims depth profile analysis of positive secondary ions. Tem-eds chemical mapping.
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