?????? ?????????? ???????? CVD ??????? ? ?????????????? ?????????????????? ? ???????? ???????????????? ????????????
????? ??????? ?????????? ?????????? - catalytic chemical vapor deposition (CCVD). ??????? ????????????? ???????????? ??? CCVD ?????? ? ??????? ???????? ? ????-???? ??????. ?????? ????????? ???????? MgO. ???????????? ???????????? ? ???? ????????????.
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